DCS

Product	Dichlorosilane(DCS)
	SiH₂Cl₂
Description	For long films used in semiconductor epitaxial wafers requiring impurity level of less than 1ppb; Main suppliers are based in Japan with a few suppliers from Europe and the US
Purity	≧ 99.95（3N5）
Container Type	A-cylinder：40L / 37KG
Valve Type	CGA636